Photometric Stereo Technology

Technique in computer vision for measuring the surface normal of an object by observing the object under different lighting conditions.
Multiples images of the object are taken from the same viewpoint and illuminated by multiple identical light sources.
The light sources emit the same light spectrum from multiple non-coplanar directions.

Large-Area Photon Streaming

Whole wafer exposure + whole wafer detection = parallel processing of defects.
Parallel processing = high throughput.
360 LAPS = 20 seconds/wafer.
Large depth-of-focus means no need to adjust focus per wafer or across wafer.

32-Bit High Dynamic Range

Provides a wide range of intensities for detecting sub-micron particles all the way to large process signatures with a single scan.
Theoretical limit for particle size detection is 15nm for 32-Bit HDR, or roughly 1 part in 4 billion.